Film Thickness Measurement
of vapor deposition layers

The highly precise technology of our TranSpec-DSP thickness gauges determine the film thickness of even sub-micron layer structures, for instance, of Vapor Deposition Layers or Photo Resist Coatings.

The picture below shows a 3D film thickness profile of a 10 x 10 mm diamond layer on silicon in the thickness range of 0.8 to 1.0 microns. Each color maps a thickness range of only 0.0012 microns (= 12 nanometer). Note the microstructures on the plateau of the diamond layer!