Engineer's Office for Applied Spectroscopy

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Film Thickness Measurement
frequently asked questions


Below are some frequently asked questions on the film thickness measurement using our FTM-Lite and TranSpec gauges. In case you cannot find your specific question, please give us a call, send an Email or use the Contact form link above.
 

Question 1: What kind of layers can I measure using TranSpec?
Question 2: Is it possible to determine multi-layers with TranSpec?
Question 3: Does TranSpec need to be calibrated on a thickness standard?
Question 4: What general layer properties do I need to know?
Question 5: How big is the measurement spot size?
Question 6: What kind of maintenance work is required?
Question 7: What's the difference between FTM-Lite and TranSpec-DSP?
 


Question 1: What kind of layers can I measure using TranSpec?
In principle all kind of transparent and in most cases also semi-transparent layers of any kind of organic material (e.g. lacquers and plastic foils), as well as  inorganic material (e.g. aluminum oxide). The type of substrate does not matter herein. Also, the layer can be liquid as well. However, metallic layers or layers with a highly concentrated pigment content cannot be measured by TranSpec.

 

Question 2: Is it possible to determine multi-layers with TranSpec?
The TranSpec film thickness gauge permits to simultaneously determine the film thickness of a double-layer system from just one measurement. However, the refraction index of both layers to be determined must be different.

 

Question 3: Does TranSpec need to be calibrated on a thickness standard?
No, the TranSpec gauges do measure the film thickness as an absolute value. However, the refraction index of the layer to be determined must be known (see also Question 4).

 

Question 4: What general layer properties do I need to know?
Only the refraction index of the layer to be determined must be known. By default, TranSpec measures the so-called "Optical Thickness" (OT). From that the required "Physical Thickness" (PT) is computed by use of the refraction index (RI) as follows: PT = OT / RI

 

Question 5: How big is the measurement spot size?
The measurement spot has a size of typically a few square millimeters, which results of the distance of the bifurcated fiber optics cable to the sample.

 

Question 6: What kind of maintenance work is required?
Pretty much none at all. The TranSpec-DSP spectrometer is free-of-maintenance, however, the halogen bulb of the HSL-2 spectral lamp has to replaced every other 3 months (which is described accordingly in the HSL-2 user's manual). The same applies for the FTM-Lite film thickness gauge.

 

Question 7: What's the difference between FTM-Lite and TranSpec-DSP?
In general the TranSpec-DSP thickness gauges are made especially for in-line measurement tasks and thus provide several TTL and D/A output signals, which can be used for current loop controls connected to a MIS. The FTM-Lite thickness gauges are made for lab use and therefore do not offer TTL or D/A output.


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Copyright © 2008 by Engineer's Office for Applied Spectroscopy, Germany
Edited last on January 08, 2008