Film Thickness Measurement
schematic gauge setup

The interference spectra of thin transparent or semi-transparent layers is measured by our TranSpec-DSP Spectrometer and our HSL-2 Halogen Spectral Lamp, from which the film thickness to be determined is computed by our FTM-ProVis 2000 software. The schematic figure below shows such a film thickness gauge setup (the same applies for our FTM-Lite thickness gauges):
 

The sample is illuminated through a bifurcated fiber optics, which is connected to the spectrometer and a halogen lamp as a pseudo white-light source. The reflected interference spectrum is then guided back to the spectrometer, where it is analyzed and the thickness is computed.