FTM-ProVis 2000 Software
for film thickness measurement

The film thickness software FTM-ProVis 2000 for Windows 2000/XP has been developed especially for in-line process control requirements. For example. the actual measuring sensor can be moved in cross-direction to the web coating machine with the help of a single axis scanning bridge (see the application example Film Thickness Measurement on Web Coating Machines).
FTM-ProVis 2000 product information and technical specifications:
 

The picture below shows an exemplary window configuration of FTM-ProVis 2000. The chart on top/left displays the currently measured interference spectrum, below is the computed film thickness result displayed. The 3D chart right beside displays the measured film thickness profile of a photo resist layer: