Engineer's Office for Applied Spectroscopy

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Plasma Emission Measurement
frequently asked questions


Below are some frequently asked questions on the plasma emission measurement using our TranSpec gauges. In case you cannot find your specific question, please give us a call, send an Email or use the Contact form above.
 

Question 1: What kind of plasma can I measure with TranSpec?
Question 2: What is the KF-Flange with Fiber Optics Coupler for?
Question 3: What is the special Vacuum Fiber Optics Cable for?
Question 4: What is the Temperature Limit of the Vacuum Fibers?
Question 5: What length of the Vacuum Fibers is available?
Question 6: What kind of maintenance work is required?
 


Question 1: What kind of plasma can I measure with TranSpec?
In general all  kind of plasma emission in the spectral range of approximately 200-1000 nanometers can be measured by TranSpec. Also, it is not necessarily required to connect the TranSpec-DSP spectrometer to a vacuum chamber using a fiber optics coupled flange (see also Question 2 and Question 3).

 

Question 2: What is the KF-Flange with Fiber Optics Coupler for?
The fiber optics coupled flange is required only for emission measurement in a low-pressure chamber. The flange ensures to seal the low pressure inside the chamber from the regular pressure outside the chamber, even if no fiber optics cable is connected on either side. Such a flange is checked down to 0.00001 mbar.

 

Question 3: What is the special Vacuum Fiber Optics Cable for?
In order to measure the plasma emission in a low-pressure chamber, we use specially manufactured fiber optics cables, whose fibers are fixed by an remittance-free glue. In addition, these fibers do not have the common PE (Polyethylene) jacket, because that would outgas. The vacuum fiber optics cable is connected inside the chamber to the special flange with fiber optics coupler (see also Question 2).

 

Question 4: What is the Temperature Limit of the Vacuum Fibers
The standard version of our vacuum fiber optics cable work up to approximately 120 degrees Centigrade (250 degrees Fahrenheit). Besides, we also provide very special high-temperature vacuum fiber optic cables up to 300 degrees Centigrade (580 degrees Fahrenheit) and 600 degrees Centigrade (1100 degrees Fahrenheit).

 

Question 5: What length of the Vacuum Fibers is available?
In principle every length you may need, from a few inches (for very small chambers) up to a few meters. Note that, due to the use of the flexible vacuum fiber optics, the plasma emission can be observed at different positions inside the chamber!

 

Question 6: What kind of maintenance work is required?
Pretty much none at all. The TranSpec-DSP spectrometer is free-of-maintenance, there is especially no need to re-calibrate the wavelengths during the entire life-time of the spectrometer.

 


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Copyright © 2008 by Engineer's Office for Applied Spectroscopy, Germany
Edited last on January 08, 2008